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A Simulation-Based Correlation of Cross-Sectional Area of The Thin Film Produced by Laser Chemical Vapor Deposition With A Moving Laser Beam
Article from Journal - ilmiah internasional
Journal of Manufacturing Science and Engineering vol. 126 no. 4 (Nov. 2004)
simulation - based correlation
cross - sectional area
Perpustakaan Pusat (Semanggi)
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Lihat Detail Induk
A parametric study on shape and cross - sectional area of the thin film produced by Laser Chemical Vapor Deposition (LCVD) with a moving laser beam is presented. The problem is formulated in the coordinate system that moves with the laser beam, and, therefore, the problem is a quasi - steady state. The effects of laser scanning velocity, laser power, and radius of the laser beam on the shapes of the deposited film are investigated. A simulation - based correlation of the cross - sectional area is proposed based on the simulation results.
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