Statistical Process Control Based Supervisory Generalized Predictve Control of Thin Film Deposition Processes  

Oleh:

Shiyu, Zhou ; Jionghua, Jin ; Huairui, Guo

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: Journal of Manufacturing Science and Engineering vol. 128 no. 1 (Feb. 2006), page 315-325.
Topik: film; statistical process; predictive control; thin film; deposition processes

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ93.8 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

This paper presents a supervisory generalized predictive control (GPC) by combining GPC with statistical process control (SPC) for the control of the thin film deposition process. In the supervised GPC, the deposition process is described as an ARMAX model for each production run and GPC is applied to the in situ thickness - sensing data for thickness control. Supervisory strategies, developed from SPC techniques, are used to monitor process changes and estimate the disturbance magnitudes during production. Based on the SPC monitoring results, different supervisory strategies are used to revise the disturbance models and the control law in the GPC to achieve a satisfactory control performance. A case study is provided to demonstrate the developed methodology.

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