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A Silicon Resonant Sensor Structure for Coriolis Mass-Flow Measurements
Article from Bulletin/Magazine
Journal of Microelectro Mechanical System vol. 6 no. 2 (1997)
coriolis mass - flow
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We present the first mass - flow sensor in silicon, based on the Coriolis - force principle. The sensor consists of a double - loop tube resonator structure with a size of only 9 × 18 × 1 mm. The tube structure is excited electrostatically into a resonance - bending or torsion vibration mode. A liquid mass flow passing through the tube induces a Coriolis force, resulting in a twisting angular motion phase shifted and perpendicular to the excitation. The excitation and Coriolis - induced angular motion are detected optically. The amplitude of the induced angular motion is linearly proportional to the mass flow and, thus, a measure thereof. The sensor can be used for measurement of fluid density since the resonance frequency of the sensor is a function of the fluid density. The measurements show the device to be a true mass - flow sensor with direction sensitivity and high linearity in the investigated flow range of as low as 0 - 0.5 g/s in either direction. A sensitivity of 2.95 (mV/V)/(g/s) and standard deviation for the measured values of 0.012 mV/V are demonstrated.
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