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Integrated Silicon Microspectrometers
Oleh:
Kong, Seong-Ho
;
Correia, J. H.
;
Graaf, G. de
;
Bartek, M.
;
Wolffenbuttel, R. F.
Jenis:
Article from Bulletin/Magazine
Dalam koleksi:
IEEE Instrumentation & Measurement Magazine vol. 4 no. 3 (2001)
,
page 34-40.
Topik:
SILICON OXIDATION
;
integrated
;
silicon
;
microspectrometers
Ketersediaan
Perpustakaan Pusat (Semanggi)
Nomor Panggil:
II47.2
Non-tandon:
1 (dapat dipinjam: 0)
Tandon:
tidak ada
Lihat Detail Induk
Isi artikel
Microspectrometers, which read color and the results from analytical chemistry, are used for quality inspection in industry and agriculture. They read the chromatography results by measuring the IR absorption of the chemical constituent between the IR source and the grating. Micromachining can implement the dispersion and detection elements in a silicon microspectrometer so that it can analyze the spectrum of incident light. The microspectrometer may either operate an array of detectors, each with a uniform spectral response, or scan the dispersion element using a single calibrated detector. Compared to bulky macroscopic devices, this microspectrometer has inferior spectral resolution but its small size and low cost more than compensates for this limitation in many applications.
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