Detail Opportunities for Microtechnology in Metrology   Oleh:  Wijngaards, D. ; Wolffenbuttel, R. F. Jenis: Article from Bulletin/Magazine Dalam koleksi: IEEE Instrumentation & Measurement Magazine vol. 4 no. 3 (2001), page 24-29. Topik: TECHNOLOGY; opportunities; microtechnology; metrology Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: II47.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel The vast infrastructure of the microelectronic and microtechnological processing industry has yielded highly reproducible devices through reliable, reproducible, and fabrication - compatible processing techniques. Much development has occurred in bulk and surface micromachining, as well as in thin-film deposition techniques. Nevertheless, only a limited number of metrological applications have benefited from the use of this technology. Only two metrological applications that use microtechnology have been developed into commercially available devices : the JJA, as a DC reference, and the thermal RMS - to - DC converter, as an AC reference. Single electron tunneling devices and micromachined electrostatic RMS - to - DC converters are still under development. The accuracy requirements of the existing applications will continue to increase. This makes the development of on - chip references and on - chip self -test and self - calibration facilities essential. These microelectronic features, until now have remained unexploited in metrology, as well as in most other applications. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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