Nanomachining of Silicon Surface Using Atomic Force Microscope With Diamond Tip  

Oleh:

Kawasegi, Noritaka ; Takano, Noboru ; Oka, Daisuke ; Morita, Noboru ; Yamada, Shigeru ; Takano, Shigeto ; Obata, Tsutomu ; Ashida, Kiwamu ; Kanda, kazutaka

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: Journal of Manufacturing Science and Engineering vol. 128 no. 3 (Agu. 2006), page 723-729.
Topik: nanomachining; nanomachining; silicon surface; atomic force; microscope; diamond tip

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ93.8 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

This paper investigates nanomachining of single - crystal silicon using an atomic force microscope with a diamond - tip cantilever. To enable nanomachining of silicon, a nanomachining cantilever with a pyramidal diamond tip was developed using a combination of photolithography and hot -f ilament chemical vapor deposition. Nanomachining experiments on silicon using the cantilever are demonstrated under various machining parameters. The silicon surface can be removed with a rate of several tens to hundreds of nanometers in ductile mode, and the cantilever shows superior wear resistance. The experiments demonstrate successful nanomachining of single - crystal silicon.

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