Micromachined Particle Filter With Low Power Dissipation  

Oleh:

Ho, Chih-Ming ; Tai, Yu-Chong ; Yang, Joon Mo ; Yang, Xing

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Fluids Engineering vol. 123 no. 4 (2001), page 899-908.
Topik: particles; micromachined; particle; filter; power dissipation

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ89.4 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

Lihat Detail Induk

Isi artikel

Microfilters for collecting micron - size airborne biological agents are designed and fabricated using a micro - electro - mechanical - system (MEMS) fabrication technology. The thickness of the microfilter ranges from 1 µm – 3 µm, and the hole diameter from 5 µm – 12 µm. Iterations between experimental and numerical studies are carried out to attain efficient microfilter designs with low pressure drop. Two orders of magnitude reduction of viscous power consumption have been achieved. A design rule of the filter in a low Reynolds - number range was first derived from numerical simulations. Highly accurate measurements of the three - dimensional (3 - D) geometry, side - wall profile, and diameter of the micron - size holes are critical in validating and modifying the design rule. The effect of the surface slip is found to be small in the tested Knudsen - number range.

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