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Investigation on the Measurement Uncertainty of Scanning Electron & Acoustic Microscopy under HOKLAS scheme
Oleh:
Lai, Lotto KH
Jenis:
Article from Proceeding
Dalam koleksi:
12th ANQ Congress in Singapore, 5-8 Agustus 2014
,
page 1-12.
Topik:
SEM
;
SAM
;
Metallic Coating Thickness
;
Delamination
;
and ISO/IEC 17025
Fulltext:
OB1-1.2-P0378.pdf
(1.45MB)
Isi artikel
This paper aims to introduce the development and implementation of uncertainty model, as well as, to discuss the quality assurance on metallic coating thickness measurement by using Scanning Electron Microscope (SEM) and delamination of failure integrated circuit (IC) chip by using Scanning Acoustic Microscope (SAM) under Laboratory Accreditation through the Hong Kong Laboratory Accreditation Scheme (HOKLAS), which is based on international standard ISO/IEC 17025 in Technology Support Centre of Hong Kong Science and Technology Parks Corporations
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