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Functional and Technological of Measurement Microsystems
Oleh:
Barwicz, A.
Jenis:
Article from Bulletin/Magazine
Dalam koleksi:
IEEE Instrumentation & Measurement Magazine vol. 7 no. 2 (May 2004)
,
page 14-19.
Topik:
TECHNOLOGICAL GROWTH
;
functional
;
technological
;
measurement microsystems
Ketersediaan
Perpustakaan Pusat (Semanggi)
Nomor Panggil:
II47.5
Non-tandon:
1 (dapat dipinjam: 0)
Tandon:
tidak ada
Lihat Detail Induk
Isi artikel
The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro - opto - electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.
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