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Detail
ArtikelFunctional and Technological of Measurement Microsystems  
Oleh: Barwicz, A.
Jenis: Article from Bulletin/Magazine
Dalam koleksi: IEEE Instrumentation & Measurement Magazine vol. 7 no. 2 (May 2004), page 14-19.
Topik: TECHNOLOGICAL GROWTH; functional; technological; measurement microsystems
Ketersediaan
  • Perpustakaan Pusat (Semanggi)
    • Nomor Panggil: II47.5
    • Non-tandon: 1 (dapat dipinjam: 0)
    • Tandon: tidak ada
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Isi artikelThe field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro - opto - electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.
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