Gas Detection system by using micro Gas Sensor With SnO2 sensitive layer  

Oleh:

Sofwan, Agus ; Priyono, A.

Jenis: Article from Proceeding
Dalam koleksi: Prosiding Seminar Nasional Riset & Teknologi Terapan (Ritektra) "Teknologi Terapan dalam Upaya Meningkatkan Produktivitas dan Daya Saing Industri Nasional", Jakarta 16 - 17 Juni 2010 : Fakultas Teknik Elektro (2010), page 65-73.
Topik: Surface; Micro channel; Gas; Sensor; SnO2-layer
Fulltext: TE-A-07 _Agus S - ISTN Jakarta_.pdf (402.44KB)

Isi artikel

This paper will describe a gas detection system for micro flow of toxin gas on gas sensor with SnO2 as sensitive layer. The gas detection system with flow in micro channel is very important in gas monitoring system (GMS). It is used to help gas flow on gas sensor, which is one of the main devices in GMS. Beside that, a structured channel with SiO2 surface is used to connect a gas Sensor and other components, which are micro pump, valve, and filter. To package and to protect the sensitive layer of gas sensor should be covered by micro mechanical channel substrate and its orifice. Silk screen method is used to attach gas sensor to channel substrate. To realize a Gas Detection System, Microsystems Technology can be used to fabricate structured surface of sensor and channel. This Sensor is a solid-state sensor, which can be used for gas or air pollution monitoring. Micro sensor in air monitoring concept is considered to play role in future environment control. The Gas sensors are mainly composed of sintered tin oxide and it can be expanded from safety to health and environment detection. This micro gas sensor consist of several electrical functions, stacked layer: thin Sensing layer with tin dioxide (SnO2), temperature sensor, resistively electrode, heater, insulating thin layer and a micro structured channel as cover packaging. A size of the micromechanical gas sensor is 6x6mm. The required power was about 2watt.

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