Effect of B-Doping on the Crystal Structural and Optical Properties of Zinc Oxide Thin Films For Photonic Devices  

Oleh:

Adriyanto, Feri ; Santosa, Usman ; Riyatun ; Wenas, Wilson W.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Proceedings Institut Teknologi Bandung vol. 33 no. 1 (2001), page 17-19.
Topik: Doping; Crystal Structural; Optical Properties; Transmittance; Refractive Index
Fulltext: Feri Adriyanto.PDF (238.04KB)

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Perpustakaan Pusat (Semanggi) Nomor Panggil: PP32 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

Effect of B-doping B2H6 on the crystal structural and optical properties of zinc oxide (ZnO) thin films has been studied. The crystal orientation of these films were evaluated by X-ray diffraction. It was found that the (110) reflection peak was dominant for all the film and became less pronounced as B2H6 flow rate was increased. The grain size of thin film decreased as B2H6 flow rate was increased. The transmittance in the ultraviolet wavelengths region shifted to higher energy as the B2H6 flow rate was increased. I t was also found that refractive index of ZnO thin films increased as the B2H6 flow rate was further increased. These doping effects should be minimized in order to grow low resistivity ZnO film with excellent optical properties for application to photonic devices.

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