6-MHz 2-N/m Piezoresistive Atomic-Force-Microscope Cantilevers With INCISIVE Tips  

Oleh:

Terris, B. D. ; Rugar, D. ; Ried, R. P. ; Mamin, H. J. ; Fan, Long-Sheng

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 4 (1997), page 294-302.
Topik: PIEZOELECTRICITY; piezoresistive; atomic - force - microscope; cantilevers; INCISIVE

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

Lihat Detail Induk

Isi artikel

Piezoresistive atomic force - microscope (AFM) cantilevers with lengths of 10 µm, displacement sensitivities of (?R/R)/A 1.1 × 10(-5), displacement resolutions of 2×10(-3) A/vHz, mechanical response times of less than 90 ns, and stiffnesses of 2 N/m have been fabricated from a silicon - on - insulator (SOI) wafer using a novel frontside - only release process. To reduce mass, the cantilevers utilize novel inplane crystallographically defined silicon variable aspect - ratio (INCISIVE) tips with radius of curvature of 40 A. The cantilevers have been used in an experimental AFM data-storage system to read back data with an areal density of 10 Gb/cm 2. Four - legged cantilevers with both imaging and thermomechanical surface modification capabilities have been used to write 2 - Gb/cm2 data at 50 kb/s on a spinning polycarbonate sample and to subsequently read the data. AFM imaging has been successfully demonstrated with the cantilevers. Some cantilever designs have sufficient displacement resolution to detect their own mechanical - thermal noise in air. The INCISIVE tips also have applications to other types of sensors.

Opini Anda

Klik untuk menuliskan opini Anda tentang koleksi ini!

Kembali