Bulk Silicon Holding Structures for Mounting of Optical Fibers in V-Grooves  

Oleh:

Backlund, Y. ; Strandman, C.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 1 (1997), page 35-40.
Topik: SILICON OXIDATION; bulk silicon; holding strucutres; mounting; optical fibers; v - grooves

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

A set of micromachined structures for holding optical fibers in anisotropically etched v - grooves has been produced. The structures are made of bulk silicon and formed in the same etch step as the aligning v - grooves, using the photovoltaic electrochemical etch - stop technique (PHET). It is a selective etch method where n - type silicon etches and p - type are passivated by combining an illuminated pn - junction and an electrochemical cell using KOH as electrolyte. The structures were produced in a variety of shapes, based on cantilever beams and doubly clamped bridges. The structures substantially facilitated the mounting of the fibers into the v - grooves. Certain structures could even push the fibers down into position in the grooves.

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