Micromechanical Switches Fabricated Using Nickel Surface Micromachining  

Oleh:

Majumder, S. ; Zavracky, P.M. ; McGruer, N. E.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 1 (1997), page 3-9.
Topik: surface tension; micromechanical; switches; fabricated; nickel surface; micromachining

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

Micromechanical switches have been fabricated in electroplated nickel using a four - level surface micromachining process. The simplest devices are configured with three terminals, a source, a drain, and a gate and are 30 µm wide, 1 µm thick, and 65 µm long. A voltage applied between the gate and source closes the switch, connecting the source to the drain. Devices switch more than 109 cycles before failure and exhibit long - lifetime hot switching currents up to 5 mA. The initial contact resistance is less than 50 mO. The breakdown (stand - off) voltage between the source and the drain is greater than 100 V and the of f -current is less than 20 fA at 100 V.

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