Piezoelectric Cantilever Microphone and Microspeaker  

Oleh:

Lee, Seung S. ; Ried, R. P. ; White, R. M.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 4 (1996), page 238-242.
Topik: PIEZOELECTRICITY; piezoelectric; cantilever; microphone; microspeaker

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

Lihat Detail Induk

Isi artikel

A micromachined piezoelectric cantilever transducer, which works both as a microphone and as a microspeaker, has been fabricated and tested. The 2000 × 2000 × 4.5 µm(3) cantilever has a zinc oxide (ZnO) piezoelectric thin film on a supporting layer of low - pressure chemical - vapor - deposited (LPCVD) low - stress silicon nitride. A highlight of the fabrication process, which may also be relevant for other micromachined structures, is the technique for producing a flat, multilayer cantilever. The measured microphone sensitivity is fairly constant at 3 mV/µbar in the low frequency range and rises to 20 mV/µbar at the lowest resonant frequency of 890 Hz. The 3 mV/µbar sensitivity is the highest reported to date for a microphone with a micromachined diaphragm. When measured into a 2 cm(3) coupler with 4 V(zero - peak) drive, the microspeaker output sound pressure level (SPL) is 75 dB at 890 Hz. It increases to approximately 100 dB SPL at 4.8 kHz with 6 V(zero - peak) drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.

Opini Anda

Klik untuk menuliskan opini Anda tentang koleksi ini!

Kembali