Electrostatic Micro Torsion Mirrors for An Optical Switch Matrix  

Oleh:

Toshiyoshi, H. ; Fujita, H.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 4 (1996), page 231-237.
Topik: optical sensor; electorstatic; micro; torsion; mirrors; optical switch matrix

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

We have developed a new type of compact optical switch using silicon micromachining technique. Torsion mirrors (300 µm × 600 µm) supported by thin polysilicon beams (16 µm wide, 320 µm long, and 0.4 µm thick) are arranged in a 2 × 2 matrix (total size 3 mm × 5 mm, t 0.3 mm). The mirrors are independently attracted by electrostatic force of applied bias voltage to redirect the incident light in a free space. Using collimated beam fibers for optical coupling, we obtained small insertion loss (& les ; -7.66 dB), considering the length of a light path (& ges ; 10 mm), a large switching contrast (& ges ; 60 dB), and small crosstalk (& les ; -60 dB). The fabrication yield was higher than 80 % thanks to the newly developed releasing technique that used a silicon oxide diaphragm as an etch - stop layer and as a mechanical support in the process. Holding voltage (& les ; 50 V) was lower than the voltage to attract the mirror (100 ~ 150 V) because of the hysteresis of angle - voltage characteristic of electrostatic operation.

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