Resonant Silicon Accelerometers in Bulk Micromachining Technology-An Approach  

Oleh:

Lora-Tamayo, E. ; Esteve, J. ; Burrer, C.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 2 (1996), page 122-130.
Topik: TECHNOLOGY; resonant; silicon; accelerometers; bulk; micromachining; technology

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

Lihat Detail Induk

Isi artikel

The fabrication and characterization of resonant silicon accelerometers, made in bulk micromachining technology, is presented. The devices consist of a silicon mass, coupled axially to a strain - sensitive vibrating silicon beam. The beam is driven electrothermally and sensed piezoresistively by means of implanted piezoresistors. Two different accelerometer types are shown, differing in the complexity of the respective fabrication processes and in performances. Closed - loop operation of the devices is demonstrated. Also in the closed loop, static and dynamic measurements of prototypes have been performed. The sensor types presented are compared, and the resonant acceleration sensor concept is discussed.

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