Vibration Modes of a Resonant Silicon Tube Density Sensor  

Oleh:

Stemme, E. ; Stemme, G. ; Enoksson, P.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 1 (1996), page 39-44.
Topik: vibrations; vibration modes; resonant; silicon tube; density sensor

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

We present an investigation of the resonance parameters for a new sensor for on - line measurements of fluid density. The sensor consists of a tube system made of single crystalline silicon. The tube system is excited electrostatically into mechanical resonance and the vibration is detected optically. Using a simplified theoretical analysis, the resonance frequency can be shown to be proportional to 1v?, where ? is the density of the silicon and the fluid weighted according to their areas in a cross section of the tube. Thus, a change in fluid density results in a change in the resonance frequency. This dependence is demonstrated by measurements for four different vibrations modes. The quality of the vibration is also investigated through measurements of the Q - values of the vibration modes. The tubes are made using anisotropic silicon KOH etching and silicon - to - silicon fusion bonding micromachining techniques. The dimensions of the tube system are 8.6 × 17.7 mm with an outer tube thickness of 1 mm and a wall thickness of 100 µm. Total tube length is 61 mm, and the sample volume is 0.035 ml. The sensor has a very good density sensitivity of the order of -200 ppm/(kgm(-3)) and a high Q of the order of 3000 for air in the tube.

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