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ArtikelQuansi-Steady State Natural Convection in Laser Chemical Vapor Deposition with a Moving Laser Beam  
Oleh: Yuwen, Zhang
Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Heat Transfer vol. 125 no. 3 (Jun. 2003), page 429-437.
Topik: natural convection; quasi - steady state; natural convection
Ketersediaan
  • Perpustakaan Pusat (Semanggi)
    • Nomor Panggil: JJ90.6
    • Non-tandon: 1 (dapat dipinjam: 0)
    • Tandon: tidak ada
    Lihat Detail Induk
Isi artikelNumerical analysis of laser chemical vapor deposition (LCVD) of titanium nitride by a moving laser beam is presented. The effect of natural convection due to temperature and concentration differences in the gaseous mixture is modeled and implemented into thermal model of LCVD by a moving laser beam. The problem is formulated in a coordinate system that moves with the laser beam and therefore, the problem is a quasi - steady state problem. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with a laser power of 300 W but becomes important when the laser power is increased to 360 W.
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