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Quansi-Steady State Natural Convection in Laser Chemical Vapor Deposition with a Moving Laser Beam
Oleh:
Yuwen, Zhang
Jenis:
Article from Bulletin/Magazine
Dalam koleksi:
Journal of Heat Transfer vol. 125 no. 3 (Jun. 2003)
,
page 429-437.
Topik:
natural convection
;
quasi - steady state
;
natural convection
Ketersediaan
Perpustakaan Pusat (Semanggi)
Nomor Panggil:
JJ90.6
Non-tandon:
1 (dapat dipinjam: 0)
Tandon:
tidak ada
Lihat Detail Induk
Isi artikel
Numerical analysis of laser chemical vapor deposition (LCVD) of titanium nitride by a moving laser beam is presented. The effect of natural convection due to temperature and concentration differences in the gaseous mixture is modeled and implemented into thermal model of LCVD by a moving laser beam. The problem is formulated in a coordinate system that moves with the laser beam and therefore, the problem is a quasi - steady state problem. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with a laser power of 300 W but becomes important when the laser power is increased to 360 W.
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