Detail Journal of Microelectro Mechanical System vol. 6 no. 4 (1997) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1997     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Editorial, halaman 290-293 6-MHz 2-N/m Piezoresistive Atomic-Force-Microscope Cantilevers With INCISIVE Tips, halaman 294-302 Microfabrication of Oxidation-Sharpened Silicon Tips on Silicon Nitride Cantilevers for Atomic Force Microscopy, halaman 303-306 Magnetic and Mechanical Properties of Micromachined Strontium Ferrite / Polyimide Composites, halaman 307-312 A Micro Strain Gauge With Mechanical Amplifier, halaman 313-321 A System for The Dynamic Characterization of Microstructures, halaman 322-328 Fabrication of High-Aspect-Ratio Microstructures on Planar and Nonplanar Surfaces Using A Modified LIGA Process, halaman 329-336 Microfabricated Lamb Wave Device Based on PZT Sol-Gel Thin Film for Mechanical Transport of Solid Particles and Liquids, halaman 337-346 Preliminary Results on A Silicon Gyrometer Based on Acoustic Mode Coupling in Small Cavities, halaman 347-354 Feasibility of Micro Power Supplies for MEMS, halaman 355-362 Hybrid Postprocessing Etching for CMOS-Compatible MEMS, halaman 363-372  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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