Detail Journal of Microelectro Mechanical System vol. 6 no. 3 (1997) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1997     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Constructing Single-and Multiple-Helical Microcoils and Characterizing Their Performance as Components of Microinductors and Microelectromagnets, halaman 184-192 A New Technique for Measuring The Mechanical Properties of Thin Films, halaman 193-199 Micro Impact Drive Mechanisms Using Optically Excited Thermal Expansion, halaman 200-207 A Liquid-Filled Microrelay With A Moving Mercury Microdrop, halaman 208-216 Microrivets for MEMS Packaging : Concept, Fabrication, and Strength Testing, halaman 217-225 Dry Release for Surface Micromachining With HF Vapor-Phase Etching, halaman 226-233 A Fabrication Processes for Electrostatic Microactuators With Integrated Gear Linkages, halaman 234-241 A Micro Active Probe Device Compatible With SOI-CMOS Technologies, halaman 242-248 Magnetically Actuated, Addressable Microstructures, halaman 249-256 Electrostatic Curved Electrode Actuators, halaman 257-265 Modeling and Optimal Design of Piezolectric Cantilever Microactuators, halaman 266-270 Fabrication of Semiconducting YBaCuO Surface-Micro Machined Bolometer Arrays, halaman 271-276 Vertical Mirrors Fabricated By Deep Reactive Ion Etching for Fiber-Optic Switching Applications, halaman 277-285 In Memoriam, halaman 183 Correction To "M-Test : A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures", halaman 286  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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