Detail Nanosecond Laser Repair of Adhered MEMS Structures   Oleh:  Phinney, Leslie M. ; Rogers, James W. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Heat Transfer vol. 124 no. 2 (Apr. 2002), page 394-396. Topik: laser; nanosecond laser repair; MEMS structures Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ90.3 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel Due to the small component sizes in modern microdevices, surface forces can create undesirable adhesion between microstructures, which is referred to as stiction. The current study uses a 100 ns, 1064 nm, Nd : YAG laser to repair polycrystalline silicon microcantilevers stuck to the underlying substrate. The results show that a Nd : YAG, 1064 nm laser is capable of repairing failed microstructures with yields exceeding those reported in earlier studies. Yields of 100 percent for cantilevers up to 1 mm in length were demonstrated for several laser operating conditions. The yields increase strongly with increased laser fluence and increase slightly with longer exposure times. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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