Nanometer-Level Comparison of Three Spindle Error Motion Separation Techniques  

Oleh:

Vallance, Ryan ; Couey, Jeremiah ; Marsh, Eric

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: Journal of Manufacturing Science and Engineering vol. 128 no. 1 (Feb. 2006), page 180-187.
Topik: COMPARISON; nanometer - level; comparison; spindle; error motion; separation techniques

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ93.8 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

This work demonstrates the state of the art capabilities of three error separation techniques for nanometer - level measurement of precision spindles and rotationally - symmetric artifacts. Donaldson reversal is compared to a multi - probe and a multi - step technique using a series of measurements carried out on a precision aerostatic spindle with a lapped spherical artifact. The results indicate that subnanometer features in both spindle error motion and artifact form are reliably resolved by all three techniques. Furthermore, the numerical error values agree to better than one nanometer. The paper discusses several issues that must be considered when planning spindle or artifact measurements at the nanometer level.

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