Analytical and Experimental Investigation of Laser-Microsphere Interaction for Nanoscale Surface Modification  

Oleh:

Howell, John R. ; Shaochen, Chen ; Heltzel, Alex J. ; Theppakuttai, Senthil

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Heat Transfer vol. 127 no. 11 (Nov. 2005), page 1231-1235.
Topik: surface; investifation; laser - microsphere; interaction; nanoscale; surface modification

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ90.10 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

An analytical and experimental investigation on the features created on silicon by the irradiation of microspheres on the substrate surface with a pulsed laser is presented. Silica microspheres of 1.76 µm diameter are deposited on the silicon substrate and are irradiated with a pulsed Nd : YAG laser of wavelength 532 nm. An analytical model based on Mie theory is developed, which includes all evanescent terms and does not rely on either far - field or size - parameter approximations. The predicted intensity distributions on the substrate indicate a strong near - field enhancement confined to a very small area (nanometer scale). A multidimensional, numerical model was built to simulate the heat transfer through the silicon. An explicit scheme of the enthalpy method was employed to track the solid / liquid phase boundary. The experiment was performed for various laser energies used in the modeling, and the features obtained are characterized using a scanning electron microscope. The experimental results correlate well with the predicted results.

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