Surface Finishing and Evaluation of Three-Dimensional Silicon Microchannel Using Magnetorheological Fluid  

Oleh:

Kim, Wook-Bae ; Lee, Seung-Hwan ; Min, Byung-Kwon

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: Journal of Manufacturing Science and Engineering vol. 126 no. 4 (Nov. 2004), page 772-778.
Topik: surface finish; surface finishing; evaluation; microchannel; magnetorheological fluid

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ93.6 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

A surface - finishing method for three - dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5 – 10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7 % of the pressure drop in an unfinished microchannel. The experimental results demonstrated that the proposed method was effective in finishing of microstructures.

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