Multi-Parameter Sensing With A Thermal Silicon Flow Sensor  

Oleh:

Kleijn, C. R. ; Putten, M. J. A. M. van ; Akker, H.E.A. van den

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Fluids Engineering vol. 124 no. 3 (2002), page 643-649.
Topik: thermal field; multi - parameter; sensing; thermal silicon; flow sensor

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ89.3 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

We present a method for multi - parameter sensing in the application of thermal vector flow sensors. The method is based on the property that two independent signals can be obtained from a single sensing element, viz. a thermal vector flow sensor. For particular applications, this reduces the number of sensors in the measurement process. It may also allow redundant measurement of physical parameters, such as temperature ; these redundant measurements are important for self - diagnostics of proper operation of a measurement system. The method is applied to a bidirectional silicon flow sensor, that generates two independent signals, both being a function of the Re number and the fluid temperature. This allows both temperature and mass flow measurement by use of a single sensor. Temperature estimates are accurate within 0.64 K and mass flow estimates within 5.6 %.

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