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ArtikelMEMS-Micropumps : A Review  
Oleh: Nguyen, Nam-Trung ; Toh, Kok Chuan ; Huang, Xiaoyang
Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Fluids Engineering vol. 124 no. 2 (2002), page 384-392.
Topik: micropump; MEMS - micropumps
Ketersediaan
  • Perpustakaan Pusat (Semanggi)
    • Nomor Panggil: JJ89.3
    • Non-tandon: 1 (dapat dipinjam: 0)
    • Tandon: tidak ada
    Lihat Detail Induk
Isi artikelMicrofluidics has emerged from the MEMS - technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components : the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS - technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
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