Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches  

Oleh:

Tamsir, Agus Santoso ; Wijaya, Sandy Tannu ; Majlis, Dato’ Burhanuddin Yeop

Jenis: Article from Journal - ilmiah nasional - terakreditasi DIKTI
Dalam koleksi: Makara Journal of Technology vol. 18 no. 02 (Aug. 2014), page 59-62.
Topik: capacitor; comb-drive actuators; resonance frequencies; RF-MEMS varactor
Fulltext: 395-436-1-SM.pdf (173.4KB)

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Perpustakaan Pusat (Semanggi) Nomor Panggil: MM64 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.

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