The FAB Design Method of Semiconductor Manufacturing with Sequential Process Flow Data  

Oleh:

Yu, Gwangjae ; Jang, Young Jae

Jenis: Article from Proceeding
Dalam koleksi: The 14th Asia Pacific Industrial Engineering and Management Systems Conference (APIEMS), 3-6 December 2013 Cebu, Philippines, page 1-8.
Topik: Semiconductor; FAB Layout Design; Facility Layout Problem; From-To chart.
Fulltext: 1249.pdf (418.43KB)

Isi artikel

The layout design of a semiconductor fab greatly affects the operational efficiency, and as a result there have been numerous researches to find the optimal layout design. A widely used approach is the material flow analysis using the From-To chart data -- a simple material flow data among the manufacturing processes. These days, the semiconductor manufacturing process is getting much complex as the new technologies and products are introduced. Therefore,analyzing it with thesimple material flow data as in the From-To chart isinsufficient that the analysis based on it cannot give the true optimal solution.In this research, a new approach based on much specific flow data emphasized with its sequencesis used to find the optimal layout design. The new method is based on the data collected from the actual operation of a memory semiconductor fab that itcan be utilized practically. An analytic model is introduced to suggest an optimal layout design based on the flow amount of wafer and themanufacturing sequence of each product. Finally, this research is aimed to suggest a new type of the fab design concept that reflects the characteristics of today's semiconductor manufacturing system.

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