Components of Variance for Diff BtB & WiB Analysis  

Oleh:

Yu, Yu Chin ; Wei, Jui Chen ; Kuo, Robber

Jenis: Article from Proceeding
Dalam koleksi: 12th ANQ Congress in Singapore, 5-8 Agustus 2014, page 1-5.
Topik: SPC (statistical process control); LtL (Lot to Lot); WtW (Wafer to Wafer); WiW (Within Wafer); BtB (Batch to Batch); WiB (Within Batch)
Fulltext: QP1-2.7-P0400.pdf (481.21KB)

Isi artikel

By the characteristic of the process and measurement in semi-conductor, we chose Nested Design of experiment design to do the components of variance analysis. A nested design is recommended for studying the effect of sources of variability that manifest themselves over time. Data collection and analysis are straightforward, and there is no reason to estimate interaction terms when dealing with time-dependent errors. Nested designs can be run at several levels. Three levels are recommended for measurement systems where sources of error are not well understood and have not previously been studied. Baseline definition & variance test of process variance that can show to engineer whether the process is stable or not. Furthermore the root cause can be found more quickly and improved. For the purpose, based on the characteristics of many measurement systems and should be adapted to a specific measurement situation as need be. We already have based on 3 levels Nested Design of Experimental Designs to build a series of index like LtL, WtW and WiW (Lot to Lot?Wafer to Wafer & Within Wafer) to monitor general process health and StS and WiS (Shot to Shot?Within Shot) for Photo. But Diff can’t find out the issue point directly and monitor batch performance efficiently by these. Divide whole variance into 4 levels, separate WiW into “BtB?WiB (Batch to Batch?Within Batch)” analysis, it is useful at checking batch health. With BtB and WiB, engineer can shorten trouble shooting time and pick out it directly and enhance process monitor capability and analysis method

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