Detail Feasibility of Micro Power Supplies for MEMS   Oleh:  Busch-Vishniac, I. J. ; Koeneman, P. B. ; Wood, K. L. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 4 (1997), page 355-362. Topik: power supplies; feasibility; micro power supplies; MEMS Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel Most microelectromechanical systems (MEMS) designed today use macroscopic power supplies, thereby placing limits on the functionality of MEMS in many applications. An alternative to this approach is to design MEMS with integral microscopic distributed power supplies. This paper examines the feasibility of creating micro power supplies by considering three functions common to MEMS power systems : (1) capture energy ; (2) store energy ; and (3) drive actuation, of these, only the capture energy function is highly dependent on the specific application. For each of the three functions, a table is presented which compares various means of performing the function. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS. We use smart bearings with active surface features as an example application and develop a design for a micro power supply suitable for this work. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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