Detail A System for The Dynamic Characterization of Microstructures   Oleh:  Glennie, D. ; Burdess, J. S. ; Wood, D. ; Pitcher, R. J. ; Harris, A. J. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 4 (1997), page 322-328. Topik: Characterization; system; dynamic characterization; microstructures Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel This paper describes a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions). To validate the system, vibration measurements have been carried on two structures - a micromachined silicon cantilever and bridge - and the results are presented. Out - of - plane measurements show that for the cantilever, both the mode shapes and resonant frequencies agree with beam theory predictions. However, for the bridge structure, tension due to boron doping causes a change from beam - like behaviour and a more complex model is required. Mode - shapes natural frequencies and modal damping are determined from data obtained by vibrating the structures using a piezoelectric mounting system and deriving the transfer function between the piezodrive voltage and beam vibrational velocity. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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