Detail A Micro Strain Gauge With Mechanical Amplifier   Oleh:  Howe, R. T. ; Pisano, A. P. ; Lin, Liwei Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 4 (1997), page 313-321. Topik: strain; micro strain; gauge; mechanical amplifier Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel A passive micro strain gauge with a mechanical amplifier has been designed, analyzed, and tested. The mechanical amplifier provides a high gain such that residual strain in thin films can be directly measured under an optical microscope. This strain gauge can be in situ fabricated with active micro sensors or actuators for monitoring residual strain effects, and both tensile and compressive residual strains can be measured via the strain gauge. It is shown that a very fine resolution of 0.001 % strain readouts can be achieved for a micro strain gauge with a 500 µm - long indicator beam. Beam theories have been used to analyze the strain gauge with a mechanical amplifier, and the results were verified by a finite - element analysis. Experimental measurements of both polysilicon and silicon - riched silicon - nitride thin films fabricated by surface micromachining processes are presented. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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