Microfabrication of Oxidation-Sharpened Silicon Tips on Silicon Nitride Cantilevers for Atomic Force Microscopy  

Oleh:

Folch, A. ; Wrighton, M. S. ; Schmidt, M. A.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 4 (1997), page 303-306.
Topik: atomic theory; microfabrication; oxidation; silicon; nitride; cantilevers; atomic force; microscopy

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon - on - insulator (SOI) wafers. The tip and cantilever are made of crystalline silicon and low - stress silicon nitride, respectively. This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever. We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones. The images acquired with our tips feature superior resolution on those samples.

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