Modeling and Optimal Design of Piezolectric Cantilever Microactuators  

Oleh:

Pisano, A. P. ; DeVoe, D. L.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 3 (1997), page 266-270.
Topik: CANTILEVER PLATE; modeling; optimal design; piezoelectric; cantilever; microactuators

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500 - µm - long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented.

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