Detail Electrostatic Curved Electrode Actuators   Oleh:  Elwenspoek, M. ; Legtenberg, R. ; Gilbert, J. ; Senturia, S. D. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 3 (1997), page 257-265. Topik: electrostatics; electrostatic; electrode; actuators Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel This paper presents the design and performance of an electrostatic actuator consisting of a laterally compliant cantilever beam and a fixed curved electrode, both suspended above a ground plane. A theoretical description of the static behavior of the cantilever as it is pulled into contact with the rigid fixed - electrode structure is given. Two models are presented : a simplified semi - analytical model based on energy methods, and fully three - dimensional (3 - D) coupled electromechanical numerical simulations using CoSolve - EM. The two models are in qualitative agreement with each other, and predict stable actuator behaviour when the beam deflection becomes constrained by the curved electrode geometry before electrostatic pull - in can occur. The pull - in behaviour depends on the shape of the curved electrode. Test devices have been fabricated by polysilicon surface micromachining techniques. Experimental results confirm the basic theoretical results. Stable behaviour with relatively large displacements and forces can be generated by these curved electrode actuators. Depending on the design, or as a result of geometrical imperfections, regions of unstable (pull - in) deflection behavior are also observed. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

Copyright © 2006, 2007 Unika Atma Jaya, all rights reserved