Micromachined Flat-Walled Valveless Diffuser Pumps  

Oleh:

Stemme, E. ; Stemme, G. ; Enoksson, P. ; Olsson, A.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 2 (1997), page 161-166.
Topik: diffuser; micromachined; flat - walled; valveless; diffuser pumps

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

The first valveless diffuser pump fabricated using the latest technology in deep reactive ion etching (DRIE) is presented. The pump was fabricated in a two - mask micromachining process in a silicon wafer polished on both sides, anodically bonded to a glass wafer. Pump chambers and diffuser elements were etched in the silicon wafer using DRIE, while inlet and outlet holes are etched using an anisotropic etch. The DRIE etch resulted in rectangular diffuser cross sections. Results are presented on pumps with different diffuser dimensions in terms of diffuser neck width, length, and angle. The maximum pump pressure is 7.6 m H2O (74 kPa), and the maximum pump flow is 2.3 ml/min for water.

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