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Accuracy Assessment of 2-D and 3-D Finite-Element Models of A Double-Stator Electrostatic Wobble Motor
Oleh:
Sangster, A. J.
;
Samper, V. D.
Jenis:
Article from Bulletin/Magazine
Dalam koleksi:
Journal of Microelectro Mechanical System vol. 6 no. 2 (1997)
,
page 142-150.
Topik:
finite element
;
accuracy assessment
;
2 - D
;
3 - D
;
finite -element
;
double - stator
;
electrostatic
;
wobble motor
Ketersediaan
Perpustakaan Pusat (Semanggi)
Nomor Panggil:
JJ30.2
Non-tandon:
1 (dapat dipinjam: 0)
Tandon:
tidak ada
Lihat Detail Induk
Isi artikel
Dynamic simulation of milimeter - scale micromotors using finite - element methods to model the electrical, mechanical, and fluidic force interactions requires that these representations be computationally efficient, yet sufficiently accurate to ensure convergence on a sound solution. This paper examines an analytic model, together with two -dimensional (2 - D) and three - dimensional (3 - D) finite - element electrostatic torque models, of a double - stator wobble motor, to assess the trade -off between accuracy and computational efficiency, with a view to incorporate the optimum model within a dynamic simulation of a motor of this type.
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