Performance of GaAs Microbridge Thermocouple Infrared Detectors  

Oleh:

Ahmed, H. ; Chong, Nui ; Srinivas, T. A. S.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 2 (1997), page 136-141.
Topik: DETECTORS; performance; GaAs; microbridge; thermocouple; infrared; detectors

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

GaAs microbridge thermocouples with lengths ranging from 40 to 650 µm and operating at room temperature have been fabricated for the detection of infrared radiation. A CO2 laser of a 10.6 µm wavelength was used to characterize the performance of the detectors in air and in vacuum. A responsivity of 4.2 V/W with a corresponding detectivity D* = 8 × 10(6) cm Hz(1/2)/W and a time constant of 2.2 ms have been measured in vacuum for 650 - µm - long bridges, and a shorter time constant of 50 µs was obtained for 40 - µm - long bridges. An analytic thermal transport model has been used to simulate the operation of the sensors. The heat - transfer coefficient has been evaluated by comparing the data from air and vacuum measurements. The spectral response and the absorbance of the microbridge have also been presented.

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