A Silicon Resonant Sensor Structure for Coriolis Mass-Flow Measurements  

Oleh:

Stemme, E. ; Stemme, G. ; Enoksson, P.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 2 (1997), page 119-125.
Topik: SILICON OXIDATION; silicon; resonant sensor; structure; coriolis mass - flow; measurements

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

Lihat Detail Induk

Isi artikel

We present the first mass - flow sensor in silicon, based on the Coriolis - force principle. The sensor consists of a double - loop tube resonator structure with a size of only 9 × 18 × 1 mm. The tube structure is excited electrostatically into a resonance - bending or torsion vibration mode. A liquid mass flow passing through the tube induces a Coriolis force, resulting in a twisting angular motion phase shifted and perpendicular to the excitation. The excitation and Coriolis - induced angular motion are detected optically. The amplitude of the induced angular motion is linearly proportional to the mass flow and, thus, a measure thereof. The sensor can be used for measurement of fluid density since the resonance frequency of the sensor is a function of the fluid density. The measurements show the device to be a true mass - flow sensor with direction sensitivity and high linearity in the investigated flow range of as low as 0 - 0.5 g/s in either direction. A sensitivity of 2.95 (mV/V)/(g/s) and standard deviation for the measured values of 0.012 mV/V are demonstrated.

Opini Anda

Klik untuk menuliskan opini Anda tentang koleksi ini!

Kembali