Detail Fabrication of An-S-Shaped Microactuator   Oleh:  Harada, T. ; Sato, K. ; Shikida, M. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 6 no. 1 (1997), page 18-24. Topik: ACTUATORS; fabrication; s - shaped; microactuator Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel We have developed a new fabrication process for electrostatic actuators having an S - shaped film element, which we previously invented for such applications as gas valves. The developed process allows batch fabrication of the actuator whose S - shaped structure height, which is equal to the amount of vertical film displacement, is of the order of a few hundred micrometers. The microactuators are fabricated by stacking three wafers. The middle wafer contains the sputtered Ni film strip which is buckled into an S - shape during the stacking process. The length of film necessary for the S - bend profile has a folded structure which is stretched after stacking. The size of the fabricated chip was 5 mm × 5 mm, and the vertical film displacement was 220 µm. The actuator was operated by electrostatic force when the applied voltage was more than 70 V. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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