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Characterization and Modeling of Metal-Film Microbolometer
Oleh:
Chou, B. C. S.
;
Ou-Yang, Mang
;
Chen, Yeong-Maw
;
Shie, Jin-Shown
Jenis:
Article from Bulletin/Magazine
Dalam koleksi:
Journal of Microelectro Mechanical System vol. 5 no. 4 (1996)
,
page 298-306.
Topik:
METALS
;
characterization
;
modeling
;
metal - film
;
microbolometer
Ketersediaan
Perpustakaan Pusat (Semanggi)
Nomor Panggil:
JJ30.1
Non-tandon:
1 (dapat dipinjam: 0)
Tandon:
tidak ada
Lihat Detail Induk
Isi artikel
The characteristic thermal parameters of a platinum - film microbolometer are extracted from the data of two measuring methods. A simple and accurate equivalent circuit model, along with its thermal behavior, is proposed for the device. Applying the model to simulate some device circuits results in good agreement with the experimental data. Furthermore, an effective method of ambient temperature compensation, proposed previously by our laboratory, is demonstrated both experimentally and by simulation using the same model. The established electro - thermal model therefore serves as an useful tool for SPICE simulations in the design of microbolometers.
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