Linear Microvibromotor for Positioning Optical Components  

Oleh:

Lau, K. Y. ; Daneman, M. J. ; Solgaard, O. ; Tien, N. C. ; Muller, R. S. ; Pisano, A. P.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 3 (1996), page 159-165.
Topik: task components; linear; microvibromotor; positioning; optical components

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

We report an electrostatically driven linear microvibromotor fabricated using surface - micromachining technology. This device is developed for use in actuated micro - optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 µm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.

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