Detail Three-Dimensional Microfabrication By Localized Electrochemical Deposition   Oleh:  Hunter, I. W. ; Madden, J. D. Jenis: Article from Bulletin/Magazine Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 1 (1996), page 24-32. Topik: fused deposition; microfabrication; electrochemical; deposition Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Isi artikel A microfabrication technology capable of electrodepositing truly three - dimensional metal structures is introduced. Micrometer - scale nickel structures including a multicoiled helical spring have been fabricated. Electrodeposition is localized by placing a sharp - tipped electrode in a plating solution, near a substrate, and applying a voltage. Structures are built by moving the electrode appropriately with respect to the substrate. Vertical deposition rates of 6 µm/s are observed, two orders of magnitude greater than those of conventional electrodeposition. The theory of mass transport to a region of localized field is discussed, and a model of deposition profile is presented. The process can potentially produce submicrometer feature sizes using a range of materials including pure metals, alloys, and polymers. Opini Anda Klik untuk menuliskan opini Anda tentang koleksi ini! Kembali

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