Surface-Micromachined Components for Articulated Microrobots  

Oleh:

Yeh, R. ; Kruglick, E. J. J. ; Pister, K. S. J.

Jenis: Article from Bulletin/Magazine
Dalam koleksi: Journal of Microelectro Mechanical System vol. 5 no. 1 (1996), page 10-17.
Topik: surface; surface; micro machined; components; microrobots

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

A class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed. Rigid links, mechanical couplings, and large - force, large - displacement micromotors have been created. Hollow triangular beams made from rotated microhinged polysilicon plates with polysilicon locks can withstand axial loads of up to 2.6 gm. Mechanical couplings with sliding mechanisms are used to rotate hinged structures off the substrate. The typical frictional force observed is approximately 2 µN. Linear electrostatic stepper motors with an estimated force of 6.5 µN at 35 V and a travel of 40 µm have also been demonstrated.

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