A Simulation Framework For The Performance Assessment Of Shop-Floor Control Systems  

Oleh:

Mönch, Lars ; Rose, Oliver ; Sturm, Roland

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: Simulation vol. 79 no. 3 (Mar. 2003), page 163-170.
Topik: Semiconductor manufacturing; shop-floor emulation via simulation; performance evaluation; shop-floor control software
Fulltext: 163.pdf (93.55KB)

Isi artikel

The authors discuss the concept and design criteria for a framework that facilitates the performance assessment of shop-floor control systems. Their basic concept includes a simulation model that emulates the shop floor of a wafer fab, sends information to the control system, and receives information back from the control system. The shop-floor control system is realized as a separate module that interfaces to the simulator via a data layer that contains the current shop-floor status and the control information generated by the controller. The authors provide detailed information on how the simulation model and shop-floor control system communicate and how each system triggers events in the other system. They show how this framework supports the performance assessment of the shop-floor control system under consideration. They also present a prototype of the framework currently implemented in the course of the SRC/International Sematech FORCe project “Scheduling of Semiconductor Wafer Fabrication Facilities.”

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