Geometrical Error Modeling and Compensation Using Neural Networks  

Oleh:

Tan, K.K. ; Huang, S.N. ; Lim, S.Y. ; Leow, Y.P. ; Liaw, H.C.

Jenis: Article from Journal - ilmiah internasional
Dalam koleksi: IEEE Transactions on Systems, Man, and Cybernetics: Part C Applications and Reviews vol. 36 no. 6 (Nov. 2006), page 797-809.
Topik: Compensation; Computer Aided Engineering; Control Systems; Laser Beams; Nonlinear Systems.

Ketersediaan

Perpustakaan Pusat (Semanggi) Nomor Panggil: II69.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada

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Isi artikel

This paper describes an approach based on neural networks (NNs) for geometrical error modeling and compensation for precision motion systems. A laser interferometer is used to obtain the systematic error measurements of the geometrical errors, based on which an error model may be constructed and, consequently, a model-based compensation may be incorporated in the motion-control system. NNs are used to approximate the components of geometrical errors, thus dispensing with the conventional lookup table. Apart from serving as a more adequate model due to its inherent nonlinear characteristics, the use of NNs also results in less memory requirements to implement the error compensation for a specified precision compared to the use of lookup table. The adequacy and clear benefits of the proposed approach are illustrated via applications to various configurations of precision-positioning stages, including a single-axis, a gantry, and a complete XY stage.

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