Detail Journal of Microelectro Mechanical System vol. 6 no. 2 (1997) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1997     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Uses of Electroplated Aluminum for The Development of Microstructures and Micromachining Processes, halaman 91-98 Design and Fabrication of Compliant Micromechanisms and Structures With Negative Poisson's Ratio, halaman 99-106 M-TEST : A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures, halaman 107-118 A Silicon Resonant Sensor Structure for Coriolis Mass-Flow Measurements, halaman 119-125 Electrostatic Aluminum Micromirrors Using Double-Pass Metallization, halaman 126-135 Performance of GaAs Microbridge Thermocouple Infrared Detectors, halaman 136-141 Accuracy Assessment of 2-D and 3-D Finite-Element Models of A Double-Stator Electrostatic Wobble Motor, halaman 142-150 Ultrasound Barrier Microsystem for Object Detection Based on Micromachined Transducer Elements, halaman 151-160 Micromachined Flat-Walled Valveless Diffuser Pumps, halaman 161-166 Gaseous Slip Flow in Long Microchannels, halaman 167-178 Acknowledgements, halaman 90 Correction to "Scratch Drive Actuator With Mechanical Links for Self-Assembly of Three-Dimensional MEMS", halaman 179  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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