Detail Journal of Microelectro Mechanical System vol. 6 no. 1 (1997) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1997     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.2 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Micromechanical Switches Fabricated Using Nickel Surface Micromachining, halaman 3-9 Scratch Drive Actuator with Mechanical Links for Self-Assembly of Three-Dimensional MEMS, halaman 10-17 Fabrication of An-S-Shaped Microactuator, halaman 18-24 Elimination of Post-Release Adhesion in Microstructures Using Conformal Fluorocarbon Coatings, halaman 25-34 Bulk Silicon Holding Structures for Mounting of Optical Fibers in V-Grooves, halaman 35-40 Fabrication and Characterization of Truly 3-D Diffuser / Nozzle Microstructures in Silicon, halaman 41-47 Defection and Maximum Load of Microfiltration Membrane Sieves Made With Silicon Micromachining, halaman 48-54 Thermal Characterization of Surface-Micromachined Silicon Nitride Membranes for Thermal Infrared Detectors, halaman 55-61 Deflection Performance of A Bi-Directional Distributed Polymeric Piezoelectric Micromotor, halaman 62-69 SOLIDIS : A Tool for Microactuator Simulation in 3-D, halaman 70-82 Editorial, halaman 2  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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