Detail Journal of Microelectro Mechanical System vol. 5 no. 4 (1996) Bibliografi Topik: TECHNOLOGY Bahasa: (EN )    ISSN: 10577157    Year:: 1996     Penerbit: IEEE/Asme Publications Jenis: Bulletin/Magazine [Lihat daftar eksemplar jurnal Journal of Microelectro Mechanical System] Ketersediaan Perpustakaan Pusat (Semanggi) Nomor Panggil: JJ30.1 Non-tandon: 1 (dapat dipinjam: 0) Tandon: tidak ada     Lihat Detail Induk Artikel dalam koleksi ini Electrostatic Micro Torsion Mirrors for An Optical Switch Matrix, halaman 231-237 Piezoelectric Cantilever Microphone and Microspeaker, halaman 238-242 Measurement of Residual Stresses in A Plate Using A Vibrational Technique-Application to Electrolytic Nickel Coatings, halaman 243-249 X-Ray Lathe : An X-Ray Lithographic Exposure Tool for Nonplanar Objects, halaman 250-255 Etch Rates of Micromachining Processing, halaman 256-269 Thin Film Shape Memory Alloy Microactuators, halaman 270-282 Multimode Digital Control of A Suspended Polysilicon Microstructure, halaman 283-297 Characterization and Modeling of Metal-Film Microbolometer, halaman 298-306 A Wafer-Bonded Floating-Element Shear Stress Microsensor With Optical Position Sensing by Photodiodes, halaman 307-315 Editorial, halaman 230  Edit Artikel Lihat Sejarah Pengadaan  Konversi Metadata   Kembali

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